Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8295316 | Method and system for managing light source operation | Richard L. Sandstrom, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen | 2012-10-23 |
| 7361918 | High repetition rate laser produced plasma EUV light source | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov | 2008-04-22 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate | Richard L. Sandstrom | 2008-01-08 |
| 7087914 | High repetition rate laser produced plasma EUV light source | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, John M. Algots, Robert N. Jacques +2 more | 2006-08-08 |
| 5359620 | Apparatus for, and method of, maintaining a clean window in a laser | — | 1994-10-25 |
| 5048041 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-09-10 |
| 5033055 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-07-16 |
| 5029177 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-07-02 |
| 5027366 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-06-25 |
| 5023884 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-06-11 |
| 5018162 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-05-21 |
| 5018161 | Compact excimer laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1991-05-21 |
| 4959840 | Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser | Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom | 1990-09-25 |