Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for laser control in a two chamber gas discharge laser

Method and apparatus for laser control in a two chamber gas discharge laser

US Patent 7720120 · Granted May 18, 2010

Estimated economic value: $5,832,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of timing laser beam pulses to regulate extreme ultraviolet light dosing2014
Multi-chamber gas discharge laser bandwidth control through discharge timing2012
Active spectral control of DUV laser light source2012
Control system for a two chamber gas discharge laser system2011
Active spectral control of DUV light source2010
Laser gas injection system2010
Multi-chamber gas discharge laser bandwidth control through discharge timing2010
Ultraviolet laser light source pulse energy control system2010
Method and apparatus for stabilizing and tuning the bandwidth of laser light2010
Method and apparatus for laser control in a two chamber gas discharge laser2010
Method and apparatus for laser control in a two chamber gas discharge laser2010
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injec2010