Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for stabilizing and tuning the bandwidth of laser light

Method and apparatus for stabilizing and tuning the bandwidth of laser light

US Patent 7822084 · Granted Oct 26, 2010

Estimated economic value: $2,243,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser light energy and dose control using repetition rate based gain estimators2025
Spectral feature selection and pulse timing control of a pulsed light beam2023
Fluid pump with adaptive filter2023
Spectral feature selection and pulse timing control of a pulsed light beam2022
Laser light energy and dose control using repetition rate based gain estimators2021
Online calibration for repetition rate dependent performance variables2021
Online calibration for repetition rate dependent performance variables2020
Lithographic apparatus and method2020
Methods for PCR and HLA typing using unpurified samples2019
Monitoring system for an optical lithography system2019
System and method for automatic gas optimization in a two-chamber gas discharge 2017
Pulsed light beam spectral feature control2017