| 9011160 |
High-contrast soap film magnification device |
— |
2015-04-21 |
| 8520186 |
Active spectral control of optical source |
Nakgeuon Seong, Ivan Lalovic, Nigel R. Farrar, Robert Jay Rafac |
2013-08-27 |
| 7598006 |
Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometer |
Adlai H. Smith, Robert O. Hunter, Jr. |
2009-10-06 |
| 7544449 |
Method and apparatus for measurement of crossfield chromatic response of projection imaging systems |
Adlai H. Smith, Robert O. Hunter, Jr. |
2009-06-09 |
| 7261985 |
Process for determination of optimized exposure conditions for transverse distortion mapping |
Adlai H. Smith, Robert O. Hunter, Jr. |
2007-08-28 |
| 6673638 |
Method and apparatus for the production of process sensitive lithographic features |
Matt Hankinson |
2004-01-06 |
| 6214721 |
Method and structure for suppressing light reflections during photolithography exposure steps in processing integrated circuit structures |
Jeffrey Robert Perry |
2001-04-10 |
| 5989763 |
Chemical gas analysis during processing of chemically amplified photoresist systems |
Andrew R. Romano, Nickhil Jakatdar |
1999-11-23 |
| 5863235 |
Spinning/rolling disc |
Laurence J. Shaw, Richard H. Wyles |
1999-01-26 |
| 5591678 |
Process of manufacturing a microelectric device using a removable support substrate and etch-stop |
Gerard T. Malloy, Ronald M. Finnila |
1997-01-07 |
| 5455202 |
Method of making a microelectric device using an alternate substrate |
Gerard T. Malloy |
1995-10-03 |
| 5027997 |
Silicon chip metallization system |
Stuart C. Billette |
1991-07-02 |