Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7767956 | Methods and systems for lithography process control | Suresh Lakkapragada, Kyle Brown, Ady Levy | 2010-08-03 |
| 7462814 | Methods and systems for lithography process control | Suresh Lakkapragada, Kyle Brown, Ady Levy | 2008-12-09 |
| 7352453 | Method for process optimization and control by comparison between 2 or more measured scatterometry signals | Walter D. Mieher, Chris Mack | 2008-04-01 |
| 6987572 | Methods and systems for lithography process control | Suresh Lakkapragada, Kyle Brown, Ady Levy | 2006-01-17 |
| 6689519 | Methods and systems for lithography process control | Kyle Brown, Ady Levy, Suresh Lakkapragada | 2004-02-10 |
| 6673638 | Method and apparatus for the production of process sensitive lithographic features | Joseph J. Bendik | 2004-01-06 |