Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8956147 | Mold for rectangular structure | Craig T. Dillon | 2015-02-17 |
| 8911587 | Photoresist double patterning apparatus | S. M. Reza Sadjadi | 2014-12-16 |
| 8361564 | Protective layer for implant photoresist | S. M. Reza Sadjadi | 2013-01-29 |
| 8282847 | Photoresist double patterning | S. M. Reza Sadjadi | 2012-10-09 |
| 7977242 | Double mask self-aligned double patterning technology (SADPT) process | S. M. Reza Sadjadi, Lumin Li | 2011-07-12 |
| 7816071 | Process of imaging a photoresist with multiple antireflective coatings | David Abdallah, Mark Neisser, Ralph R. Dammel, Georg Pawlowski, John Biafore | 2010-10-19 |
| 7537879 | Photoresist composition for deep UV and process thereof | Francis Houlihan, Ralph R. Dammel, Munirathna Padmanaban, M. Dalil Rahman | 2009-05-26 |
| 7473512 | Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof | Francis Houlihan, Ralph R. Dammel, Raj Sakamuri | 2009-01-06 |
| 5989763 | Chemical gas analysis during processing of chemically amplified photoresist systems | Joseph J. Bendik, Nickhil Jakatdar | 1999-11-23 |