Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7291853 | Discharge produced plasma EUV light source | Igor V. Fomenkov, William N. Partlo, Nortbert Bowering, I. Roger Oliver, Xiaojiang Pan +1 more | 2007-11-06 |
| 7217940 | Collector for EUV light source | William N. Partlo, John M. Algots, Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov +1 more | 2007-05-15 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |