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Nortbert Bowering

CY Cymer: 1 patents #195 of 339Top 60%
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7291853 Discharge produced plasma EUV light source Igor V. Fomenkov, William N. Partlo, Gerry Blumenstock, I. Roger Oliver, Xiaojiang Pan +1 more 2007-11-06