Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7642533 | Extreme ultraviolet light source | Igor V. Fomenkov, Oleh Khodykin | 2010-01-05 |
| 7288778 | Collector for EUV light source | Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov | 2007-10-30 |
| 7009140 | Laser thin film poly-silicon annealing optical system | Palash P. Das, Russell Hudyma, Michael Thomas | 2006-03-07 |
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior, John M. Algots +11 more | 2005-06-07 |
| 6021150 | Laser having baffled enclosure | Donald G. Larson, Igor V. Fomenkov, Anthony John de Ruyter, Palash P. Das | 2000-02-01 |