Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8686370 | EUV light source components and methods for producing, using and refurbishing same | Norbert Bowering | 2014-04-01 |
| 8461560 | LPP EUV light source drive laser system | Alexander I. Ershov, Alexander N. Bykanov, Igor V. Fomenkov | 2013-06-11 |
| 8314398 | EUV light source components and methods for producing, using and refurbishing same | Norbert Bowering, Igor V. Fomenkov, Alexander N. Bykanov | 2012-11-20 |
| 8035092 | Laser produced plasma EUV light source | Alexander N. Bykanov, Norbert Bowering, Igor V. Fomenkov, Alexander I. Ershov | 2011-10-11 |
| 7960701 | EUV light source components and methods for producing, using and refurbishing same | Norbert Bowering | 2011-06-14 |
| 7928417 | LPP EUV light source drive laser system | Alexander I. Ershov, Alexander N. Bykanov, Igor V. Fomenkov | 2011-04-19 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov +2 more | 2011-01-18 |
| 7732793 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Alexander I. Ershov, William Marx, Norbert Bowering, Bjorn Hansson, Igor V. Fomenkov | 2010-06-08 |
| 7671349 | Laser produced plasma EUV light source | Alexander N. Bykanov, Norbert Bowering, Igor V. Fomenkov, David C. Brandt, Alexander I. Ershov +1 more | 2010-03-02 |
| 7642533 | Extreme ultraviolet light source | William N. Partio, Igor V. Fomenkov | 2010-01-05 |
| 7589337 | LPP EUV plasma source material target delivery system | Alexander N. Bykanov, J. Martin Algots, Oscar Hemberg, Norbert Bowering | 2009-09-15 |
| 7491954 | Drive laser delivery systems for EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, Alexander I. Ershov | 2009-02-17 |
| 7482609 | LPP EUV light source drive laser system | Alexander I. Ershov, Alexander N. Bykanov, Igor V. Fomenkov | 2009-01-27 |
| 7465946 | Alternative fuels for EUV light source | Norbert Bowering, Alexander N. Bykanov, Igor V. Fomenkov | 2008-12-16 |
| 7439530 | LPP EUV light source drive laser system | Alexander I. Ershov, Alexander N. Bykanov, Igor V. Fomenkov | 2008-10-21 |
| 7402825 | LPP EUV drive laser input system | Rodney D. Simmons, John Viatella, Jerzy Hoffman, R. Kyle Webb, Alexander N. Bykanov | 2008-07-22 |
| 7378673 | Source material dispenser for EUV light source | Alexander N. Bykanov | 2008-05-27 |
| 7372056 | LPP EUV plasma source material target delivery system | Alexander N. Bykanov, J. Martin Algots, Oscar Hemberg | 2008-05-13 |
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7365349 | EUV light source collector lifetime improvements | William N. Partlo, Alexander I. Ershov, Igor V. Fomenkov | 2008-04-29 |
| 7180081 | Discharge produced plasma EUV light source | John Walker, R. Kyle Webb | 2007-02-20 |
| 7109503 | Systems for protecting internal components of an EUV light source from plasma-generated debris | Norbert Bowering, Bjorn Hansson, Alexander N. Bykanov, Alexander I. Ershov, William N. Partlo | 2006-09-19 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |
| 6815700 | Plasma focus light source with improved pulse power system | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +1 more | 2004-11-09 |