| 8061923 |
Blind motorized coupling arrangements for coupling UV light source subsystem and scanner subsystem in a UV lithography system and methods therefor |
— |
2011-11-22 |
| 7872245 |
Systems and methods for target material delivery in a laser produced plasma EUV light source |
Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov +2 more |
2011-01-18 |
| 7453077 |
EUV light source |
Norbert Bowering, Bjorn Hansson |
2008-11-18 |
| 7402825 |
LPP EUV drive laser input system |
John Viatella, Jerzy Hoffman, R. Kyle Webb, Alexander N. Bykanov, Oleh Khodykin |
2008-07-22 |
| 7368741 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2008-05-06 |
| 7291853 |
Discharge produced plasma EUV light source |
Igor V. Fomenkov, William N. Partlo, Gerry Blumenstock, Nortbert Bowering, I. Roger Oliver +1 more |
2007-11-06 |
| 6972421 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2005-12-06 |
| D471720 |
Camouflage fabric |
— |
2003-03-18 |