Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Alexander I. Ershov, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior +7 more | 2003-04-01 |
| 6466602 | Gas discharge laser long life electrodes | Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko +4 more | 2002-10-15 |
| 6442181 | Extreme repetition rate gas discharge laser | I. Roger Oliver, William N. Partlo, Richard M. Ness, Richard L. Sandstrom, Stuart L. Anderson +4 more | 2002-08-27 |
| 6414979 | Gas discharge laser with blade-dielectric electrode | Richard C. Ujazdowski, Michael C. Cates, Richard G. Morton, Ross H. Winnick | 2002-07-02 |
| 6363094 | Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects | Richard G. Morton | 2002-03-26 |
| 6317447 | Electric discharge laser with acoustic chirp correction | William N. Partlo, Igor V. Fomenkov, Zsolt Bor, Eckehard D. Onkels, Michael C. Cates +3 more | 2001-11-13 |
| 6018537 | Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser | Thomas Hofmann, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior +7 more | 2000-01-25 |