Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588430 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Matthew R. Graham, Charles E. Kinney, Wayne J. Dunstan | 2017-03-07 |
| 9238243 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Matthew R. Graham, Charles E. Kinney, Wayne J. Dunstan | 2016-01-19 |