Issued Patents All Time
Showing 51–75 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7088758 | Relax gas discharge laser lithography light source | William N. Partlo, Daniel J. W. Brown, Thomas A. Yager, Alexander I. Ershov, Robert Jay Rafac +1 more | 2006-08-08 |
| 7087914 | High repetition rate laser produced plasma EUV light source | Robert P. Akins, William N. Partlo, Igor V. Fomenkov, John M. Algots, Robert N. Jacques +2 more | 2006-08-08 |
| 7079556 | Bandwidth control technique for a laser | Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Frederick Erie +2 more | 2006-07-18 |
| 7061961 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2006-06-13 |
| 7058107 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, German E. Rylov, Eckehard D. Onkels, Herve A. Besaucele +8 more | 2006-06-06 |
| 7039086 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Robert N. Jacques, Jacob Lipcon, William N. Partlo +5 more | 2006-05-02 |
| 7016388 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Scot Smith +1 more | 2006-03-21 |
| 6985508 | Very narrow band, two chamber, high reprate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Meyers, Alexander I. Ershov +10 more | 2006-01-10 |
| 6914919 | Six to ten KHz, or greater gas discharge laser system | Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Robert A. Shannon, R. Kyle Webb +6 more | 2005-07-05 |
| 6914927 | Laser discharge chamber passivation by plasma | Tom A. Watson, Richard G. Morton, Robert E. Weeks, John Quitter, Mark R. Lewis | 2005-07-05 |
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, William N. Partio, Xiaojiang Pan, John T. Melchior, John M. Algots +11 more | 2005-06-07 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Paul C. Melcher, David M. Johns, Robert B. Saethre +19 more | 2005-04-19 |
| 6801560 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, German E. Rylov, Eckehard D. Onkels, Herve A. Besaucele +8 more | 2004-10-05 |
| 6798812 | Two chamber F2 laser system with F2 pressure based line selection | German E. Rylov, Thomas Hofmann | 2004-09-28 |
| 6795474 | Gas discharge laser with improved beam path | William N. Partlo, Holzer K. Glatzel, Raymond F. Cybulski, Peter Clarke Newman, James K. Howey +3 more | 2004-09-21 |
| 6778584 | High power gas discharge laser with helium purged line narrowing unit | William N. Partlo, Raymond F. Cybulski, Igor V. Fomenkov, Alexander I. Ershov | 2004-08-17 |
| 6765945 | Injection seeded F2 laser with pre-injection filter | William N. Partlo, Eckehard D. Onkels | 2004-07-20 |
| 6757316 | Four KHz gas discharge laser | Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Paul C. Melcher, David M. Johns +14 more | 2004-06-29 |
| 6750972 | Gas discharge ultraviolet wavemeter with enhanced illumination | John T. Melchior, Rajasekhar Rao | 2004-06-15 |
| 6721340 | Bandwidth control technique for a laser | Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Frederick Erie +2 more | 2004-04-13 |
| 6713770 | High resolution spectral measurement device | Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Scott T. Smith, Daniel J. W. Brown | 2004-03-30 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb +4 more | 2004-03-09 |
| 6693939 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Scot Smith +1 more | 2004-02-17 |
| 6690704 | Control system for a two chamber gas discharge laser | John P. Fallon, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara, John Meisner +4 more | 2004-02-10 |
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, John M. Algots +1 more | 2003-12-30 |