Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8598559 | Systems and methods for beam splitting for imaging | Michael L. Blume | 2013-12-03 |
| 7567607 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2009-07-28 |
| 7369597 | Laser output light pulse stretcher | Alexander I. Ershov, Alexei Lukashev | 2008-05-06 |
| 7218661 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2007-05-15 |
| 7061961 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2006-06-13 |
| 7016388 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Xiaojiang Pan +1 more | 2006-03-21 |
| 6928093 | Long delay and high TIS pulse stretcher | R. Kyle Webb, Roy S. Luoma | 2005-08-09 |
| 6693939 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Xiaojiang Pan +1 more | 2004-02-17 |