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Systems and methods for beam splitting for imaging |
Michael L. Blume |
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Very narrow band, two chamber, high rep-rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more |
2009-07-28 |
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Laser output light pulse stretcher |
Alexander I. Ershov, Alexei Lukashev |
2008-05-06 |
| 7218661 |
Line selected F2 two chamber laser system |
David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more |
2007-05-15 |
| 7061961 |
Very narrow band, two chamber, high rep-rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more |
2006-06-13 |
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Laser lithography light source with beam delivery |
Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Xiaojiang Pan +1 more |
2006-03-21 |
| 6928093 |
Long delay and high TIS pulse stretcher |
R. Kyle Webb, Roy S. Luoma |
2005-08-09 |
| 6693939 |
Laser lithography light source with beam delivery |
Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Xiaojiang Pan +1 more |
2004-02-17 |