Issued Patents All Time
Showing 101–125 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6078599 | Wavelength shift correction technique for a laser | George J. Everage, Igor V. Fomenkov, Palash P. Das | 2000-06-20 |
| 6067306 | Laser-illuminated stepper or scanner with energy sensor feedback | Palash P. Das, Igor V. Fomenkov, Herve A. Besaucele, Robert G. Ozarski | 2000-05-23 |
| 6058739 | Long life fused silica ultraviolet optical elements | Richard G. Morton, William N. Partlo | 2000-05-09 |
| 6018537 | Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2000-01-25 |
| 6016325 | Magnetic modulator voltage and temperature timing compensation circuit | Richard M. Ness, William N. Partlo | 2000-01-18 |
| 6005879 | Pulse energy control for excimer laser | Herve A. Besaucele, Igor V. Fomenkov, Palash P. Das | 1999-12-21 |
| 5991324 | Reliable. modular, production quality narrow-band KRF excimer laser | David S. Knowles, James H. Azzola, Herve A. Besaucele, Palash P. Das, Alexander I. Ershov +8 more | 1999-11-23 |
| 5978391 | Wavelength reference for excimer laser | Palash P. Das, Igor V. Fomenkov | 1999-11-02 |
| 5978394 | Wavelength system for an excimer laser | Peter Clarke Newman | 1999-11-02 |
| 5949806 | High voltage cable interlock circuit | Richard M. Ness, William N. Partlo | 1999-09-07 |
| 5914974 | Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules | William N. Partlo, Daniel L. Birx, Richard M. Ness | 1999-06-22 |
| 5898725 | Excimer laser with greater spectral bandwidth and beam stability | Igor V. Fomenkov | 1999-04-27 |
| 5852621 | Pulse laser with pulse energy trimmer | — | 1998-12-22 |
| 5440578 | Gas replenishment method and apparatus for excimer lasers | — | 1995-08-08 |
| 5420877 | Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby | — | 1995-05-30 |
| 5095492 | Spectral narrowing technique | — | 1992-03-10 |
| 5048041 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-09-10 |
| 5033055 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-07-16 |
| 5029177 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-07-02 |
| 5027366 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-06-25 |
| 5025445 | System for, and method of, regulating the wavelength of a light beam | Stuart L. Anderson | 1991-06-18 |
| 5023884 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-06-11 |
| 5018161 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-05-21 |
| 5018162 | Compact excimer laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1991-05-21 |
| 4959840 | Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser | Robert P. Akins, Donald G. Larson, Uday K. Sengupta | 1990-09-25 |