Issued Patents All Time
Showing 76–100 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650666 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, John Allen Rule, Frederick Palenschat, Igor V. Fomenkov +2 more | 2003-11-18 |
| 6644324 | Laser discharge chamber passivation by plasma | Tom A. Watson, Richard G. Morton, Robert E. Weeks, John Quitter, Mark R. Lewis | 2003-11-11 |
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2003-09-23 |
| 6621846 | Electric discharge laser with active wavelength chirp correction | Palash P. Das, George J. Everage, Frederick Erie, William N. Partlo, Igor V. Fomenkov | 2003-09-16 |
| 6603549 | Convolution method for measuring laser bandwidth | Steven F. Haas, Thomas Hofmann, Alexander I. Ershov | 2003-08-05 |
| 6590922 | Injection seeded F2 laser with line selection and discrimination | Eckehard D. Onkels, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh | 2003-07-08 |
| 6586757 | Plasma focus light source with active and buffer gas control | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx late of +1 more | 2003-07-01 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Theodorus Hubertus Josephus Bisschops, Vadim Yevgenyevich Banine, Jeroen Jonkers | 2003-06-10 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Palash P. Das +7 more | 2003-05-20 |
| 6566668 | Plasma focus light source with tandem ellipsoidal mirror units | John Rauch, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx +1 more | 2003-05-20 |
| 6556600 | Injection seeded F2 laser with centerline wavelength control | Richard M. Ness, William N. Partlo, Alexander I. Ershov, Eckehard D. Onkels, Choonghoon Oh | 2003-04-29 |
| 6549551 | Injection seeded laser with precise timing control | Richard M. Ness, William N. Partlo, Alexander I. Ershov | 2003-04-15 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2003-04-01 |
| 6538737 | High resolution etalon-grating spectrometer | Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Daniel J. W. Brown | 2003-03-25 |
| 6539046 | Wavemeter for gas discharge laser | Peter Clarke Newman, John T. Melchior | 2003-03-25 |
| 6532247 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Frederick Palenschat +4 more | 2003-03-11 |
| 6529531 | Fast wavelength correction technique for a laser | George J. Everage, Igor V. Fomenkov, Palash P. Das, Frederick Erie, John M. Algots | 2003-03-04 |
| 6480275 | High resolution etalon-grating monochromator | Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Scott T. Smith | 2002-11-12 |
| 6442181 | Extreme repetition rate gas discharge laser | I. Roger Oliver, William N. Partlo, Richard M. Ness, Stuart L. Anderson, Alex P. Ivaschenko +4 more | 2002-08-27 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov, William N. Partlo | 2002-04-09 |
| 6330260 | F2 laser with visible red and IR control | Eckehard D. Onkels, Thomas Patrick Duffey | 2001-12-11 |
| 6330261 | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser | Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior, Herve A. Besaucele, Richard G. Morton +4 more | 2001-12-11 |
| 6327286 | High speed magnetic modulator voltage and temperature timing compensation circuit | Richard M. Ness, William N. Partlo, David M. Johns | 2001-12-04 |
| 6240117 | Fluorine control system with fluorine monitor | Mengxiong Gong, Tom A. Watson, Palash P. Das, Thomas Patrick Duffey | 2001-05-29 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Herve A. Besaucele, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov +14 more | 2000-10-03 |