Issued Patents All Time
Showing 26–50 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075732 | EUV collector debris management | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, William Oldham, William Marx +1 more | 2011-12-13 |
| 8014432 | Regenerative ring resonator | Hong Ye, Slava Rokitski, Daniel J. W. Brown, Robert Jay Rafac | 2011-09-06 |
| 7995637 | Gas discharge laser chamber | William N. Partlo, Daniel J. W. Brown, Bryan Moosman, Tae Hoon Chung, Thomas Patrick Duffey +2 more | 2011-08-09 |
| RE42588 | Control system for a two chamber gas discharge laser system | John P. Fallon, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara, John Meisner +4 more | 2011-08-02 |
| 7920616 | Laser system | Daniel J. W. Brown, William N. Partlo | 2011-04-05 |
| 7885309 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more | 2011-02-08 |
| 7856044 | Extendable electrode for gas discharge laser | Tae (Mark) H. Chung, Richard C. Ujazdowski | 2010-12-21 |
| 7838854 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Oscar Hemberg +2 more | 2010-11-23 |
| RE41457 | Wavemeter for gas discharge laser | Peter Clarke Newman, John T. Melchior | 2010-07-27 |
| 7715459 | Laser system | Daniel J. W. Brown, William N. Partlo | 2010-05-11 |
| 7643529 | Laser system | Daniel J. W. Brown, William N. Partlo | 2010-01-05 |
| 7643528 | Immersion lithography laser light source with pulse stretcher | William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more | 2010-01-05 |
| 7567607 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2009-07-28 |
| 7564888 | High power excimer laser with a pulse stretcher | Alexander I. Ershov, James J. Ferrell, Thomas Hofmann, Daniel J. Reiley, Christopher R. Remen | 2009-07-21 |
| 7405416 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Oscar Hemberg +2 more | 2008-07-29 |
| 7366219 | Line narrowing module | J. Martin Algots, Robert A. Bergstedt, Walter Dale Gillespie, Vladimir Kulgeyko, William N. Partlo +3 more | 2008-04-29 |
| 7361918 | High repetition rate laser produced plasma EUV light source | Robert P. Akins, William N. Partlo, Igor V. Fomenkov | 2008-04-22 |
| 7346093 | DUV light source optical element improvements | John M. Algots, Joshua Brown, Raymond F. Cybulski, John Dunlop, James K. Howey +6 more | 2008-03-18 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate | Robert P. Akins | 2008-01-08 |
| 7277466 | High power gas discharge laser with helium purged line narrowing unit | William N. Partlo, Raymond F. Cybulski, Igor V. Fomenkov, Alexander I. Ershov | 2007-10-02 |
| 7230964 | Lithography laser with beam delivery and beam pointing control | Plash P. Das, R. Kyle Webb, Marco Giovanardi, Gregory Francis, Huckleberry Dorn +3 more | 2007-06-12 |
| 7218661 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, German E. Rylov, Eckehard D. Onkels, Herve A. Besaucele +8 more | 2007-05-15 |
| 7154928 | Laser output beam wavefront splitter for bandwidth spectrum control | Daniel J. W. Brown, Alexander I. Ershov, Igor V. Fomenkov, William N. Partlo | 2006-12-26 |
| 7139301 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, John M. Algots +1 more | 2006-11-21 |
| 7136169 | Etalon testing system and process | — | 2006-11-14 |