Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964858 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman | 2018-05-08 |
| 9110389 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman | 2015-08-18 |
| 8363208 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs | 2013-01-29 |
| 7684008 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman | 2010-03-23 |
| 7456413 | Apparatus for evacuating a sample | Bart Buijsse, Mark Meuwese, Maria Van Wely-Dieleman, Sjoerd Antonius Maria Mentink | 2008-11-25 |
| 7397040 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2008-07-08 |
| 7317504 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs | 2008-01-08 |
| 7315346 | Lithographic apparatus and device manufacturing method | Michael Cornelis Van Beek, Levinus Pieter Bakker, Jeroen Jonkers, Mark Kroon, Robertus Adrianus Maria Wolters +1 more | 2008-01-01 |
| 7285785 | Apparatus with permanent magnetic lenses | Bart Buijsse, Mark Meuwese | 2007-10-23 |
| 7084953 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2006-08-01 |
| 7064325 | Apparatus with permanent magnetic lenses | Bart Buijsse, Mark Meuwese | 2006-06-20 |
| 6930753 | Lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2005-08-16 |
| 6844922 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2005-01-18 |
| 6816238 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2004-11-09 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Johannes C. Driessen, Jakob Vijfvinkel, Marinus J. J. Dona, Mark Meuwese, Ronald Maarten Schneider +2 more | 2004-08-10 |
| 6740891 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2004-05-25 |
| 6630984 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2003-10-07 |
| 6618122 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-09-09 |
| 6603130 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-08-05 |
| 6597433 | Multi-stage drive arrangements and their application in lithographic projection apparatuses | Michael J. M. Renkens, Adrianus G. Bouwer, Johannes C. Driessen, Hermanus M. J. R. Soemers, Jakob Vijfvinkel | 2003-07-22 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Richard L. Sandstrom, Vadim Yevgenyevich Banine, Jeroen Jonkers | 2003-06-10 |
| 6545377 | Coil with cooling means | — | 2003-04-08 |
| 6538257 | Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit | — | 2003-03-25 |
| 6493423 | METHOD OF GENERATING EXTREMELY SHORT-WAVE RADIATION, METHOD OF MANUFACTURING A DEVICE BY MEANS OF SAID RADIATION, EXTREMELY SHORT-WAVE RADIATION SOURCE UNIT AND LITHOGRAPHIC PROJECTION APPARATUS PROVIDED WITH SUCH A RADIATION SOURCE UNIT | — | 2002-12-10 |
| 6445440 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-09-03 |