Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421112 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-07-16 |
| 6304630 | Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit | Joseph Johannes Antonius Maria Vrakking, Mark Meuwese | 2001-10-16 |