| 7397040 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken |
2008-07-08 |
| 7084953 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken |
2006-08-01 |
| 7049592 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Gerard Van Schothorst +1 more |
2006-05-23 |
| 6844922 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Adrianus G. Bouwer |
2005-01-18 |
| 6816238 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Adrianus G. Bouwer |
2004-11-09 |
| 6740891 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken |
2004-05-25 |
| 6618122 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Adrianus G. Bouwer |
2003-09-09 |
| 6603130 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Adrianus G. Bouwer |
2003-08-05 |
| 6597431 |
Lithographic projection apparatus and device manufacturing method |
Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more |
2003-07-22 |
| 6597433 |
Multi-stage drive arrangements and their application in lithographic projection apparatuses |
Adrianus G. Bouwer, Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel |
2003-07-22 |
| 6445440 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Adrianus G. Bouwer |
2002-09-03 |
| 6421112 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Adrianus G. Bouwer |
2002-07-16 |