Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7666555 | Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography | Michael Goldstein, Daniel Tanzil | 2010-02-23 | $16,403,000 |
| 7408179 | Transition radiation apparatus and method therefor | — | 2008-08-05 | $25,514,000 |
| 7214950 | Transition radiation apparatus | Sang Hun Lee, Christof Krautschik | 2007-05-08 | $17,693,000 |
| 7075699 | Double hidden flexure microactuator for phase mirror array | William Oldham, Yijian Chen | 2006-07-11 |