Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7666555 | Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography | Michael Goldstein, Yashesh Shroff | 2010-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7666555 | Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography | Michael Goldstein, Yashesh Shroff | 2010-02-23 |