Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7666555 | Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography | Michael Goldstein, Yashesh Shroff | 2010-02-23 | $16,403,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7666555 | Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography | Michael Goldstein, Yashesh Shroff | 2010-02-23 | $16,403,000 |