Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8764905 | Cleaning organic residues from EUV optics and masks | Paul A. Zimmerman | 2014-07-01 |
| 7214950 | Transition radiation apparatus | Sang Hun Lee, Yashesh Shroff | 2007-05-08 |
| 6781670 | Immersion lithography | — | 2004-08-24 |
| 6069739 | Method and lens arrangement to improve imaging performance of microlithography exposure tool | Yan Borodovsky | 2000-05-30 |