Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Norbert Bowering, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |
| 7838854 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more | 2010-11-23 |
| 7812329 | System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus | David C. Brandt, Igor V. Fomenkov, William N. Partlo | 2010-10-12 |
| 7741626 | Spectral purity filters and methods therefor | Igor V. Fomenkov | 2010-06-22 |
| 7671349 | Laser produced plasma EUV light source | Norbert Bowering, Igor V. Fomenkov, David C. Brandt, Alexander I. Ershov, Oleh Khodykin +1 more | 2010-03-02 |
| 7655925 | Gas management system for a laser-produced-plasma EUV light source | Alexander I. Ershov, Igor V. Fomenkov, David C. Brandt | 2010-02-02 |
| 7589337 | LPP EUV plasma source material target delivery system | J. Martin Algots, Oleh Khodykin, Oscar Hemberg, Norbert Bowering | 2009-09-15 |
| 7518787 | Drive laser for EUV light source | Jerzy Hoffman, Igor V. Fomenkov, William N. Partlo | 2009-04-14 |
| 7491954 | Drive laser delivery systems for EUV light source | Igor V. Fomenkov, Oleh Khodykin, Alexander I. Ershov | 2009-02-17 |
| 7482609 | LPP EUV light source drive laser system | Alexander I. Ershov, Oleh Khodykin, Igor V. Fomenkov | 2009-01-27 |
| 7476886 | Source material collection unit for a laser produced plasma EUV light source | Bjorn Hansson | 2009-01-13 |
| 7465946 | Alternative fuels for EUV light source | Norbert Bowering, Oleh Khodykin, Igor V. Fomenkov | 2008-12-16 |
| 7449703 | Method and apparatus for EUV plasma source target delivery target material handling | — | 2008-11-11 |
| 7439530 | LPP EUV light source drive laser system | Alexander I. Ershov, Oleh Khodykin, Igor V. Fomenkov | 2008-10-21 |
| 7405416 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more | 2008-07-29 |
| 7402825 | LPP EUV drive laser input system | Rodney D. Simmons, John Viatella, Jerzy Hoffman, R. Kyle Webb, Oleh Khodykin | 2008-07-22 |
| 7378673 | Source material dispenser for EUV light source | Oleh Khodykin | 2008-05-27 |
| 7372056 | LPP EUV plasma source material target delivery system | J. Martin Algots, Oleh Khodykin, Oscar Hemberg | 2008-05-13 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source | William Marx | 2008-04-08 |
| 7109503 | Systems for protecting internal components of an EUV light source from plasma-generated debris | Norbert Bowering, Bjorn Hansson, Oleh Khodykin, Alexander I. Ershov, William N. Partlo | 2006-09-19 |
| 7002168 | Dense plasma focus radiation source | Jonah H. Jacob, Joseph Mangano, James Moran, Rodney Petr, Mordechai Rokni | 2006-02-21 |