Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217997 | Cleanroom compatible robotic end effector exchange system | Benjamin James Thomas Clarke, Asaf Wiseman, Tzachi Pressburger, Michael Brisman | 2025-02-04 |
| 11513085 | Measurement and control of wafer tilt for x-ray based metrology | Barry Blasenheim, Yan Zhang, Robert Press, Huy D. Nguyen | 2022-11-29 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Antonio Arion Gellineau, Alexander Kuznetsov, Andrei Veldman +1 more | 2021-07-27 |
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | John J. Hench, Antonio Arion Gellineau, Nikolay Artemiev | 2019-11-19 |
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Alexander N. Bykanov, Nikolay Artemiev, John Viatella | 2019-07-23 |
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Joshua Randall Clyne, Samir Nayfeh, Mark Williams +1 more | 2017-06-27 |