| 11921433 |
Optical metrology in machine learning to characterize features |
Ye Feng, Osman Sorkhabi |
2024-03-05 |
| 11704463 |
Method of etch model calibration using optical scatterometry |
Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman +1 more |
2023-07-18 |
| 11513085 |
Measurement and control of wafer tilt for x-ray based metrology |
Barry Blasenheim, Joseph A. Di Regolo, Robert Press, Huy D. Nguyen |
2022-11-29 |
| 10997345 |
Method of etch model calibration using optical scatterometry |
Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman +1 more |
2021-05-04 |
| 10621264 |
Correction of angular error of plane-of-incidence azimuth of optical metrology device |
Pedro Vagos, Ye Feng, Daniel Thompson |
2020-04-14 |
| 10572697 |
Method of etch model calibration using optical scatterometry |
Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman +1 more |
2020-02-25 |
| 10296554 |
Correction of angular error of plane-of-incidence azimuth of optical metrology device |
Pedro Vagos, Ye Feng, Daniel Thompson |
2019-05-21 |
| 9544062 |
Coherent optical receiver |
Geoff W. Taylor |
2017-01-10 |
| 9377587 |
Fiber optic coupler array |
Geoff W. Taylor |
2016-06-28 |
| 9004709 |
Anti-abrasion optical diffusion film, LCD device and lighting device |
Yadong Jin |
2015-04-14 |
| 8823899 |
Liquid crystal display device and plastic frame thereof |
— |
2014-09-02 |
| 8721155 |
Light bar assembly and backlight module |
Shuang Lu |
2014-05-13 |
