Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11704463 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Saravanapriyan Sriraman, Yan Zhang +1 more | 2023-07-18 |
| 10997345 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Saravanapriyan Sriraman, Yan Zhang +1 more | 2021-05-04 |
| 10683234 | Methods of making antimicrobial glass articles | Ekaterina Aleksandrovna Kuksenkova, Sumalee Likitvanichkul, Santona Pal | 2020-06-16 |
| 10572697 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Saravanapriyan Sriraman, Yan Zhang +1 more | 2020-02-25 |
| 10534257 | Layout pattern proximity correction through edge placement error prediction | Saravanapriyan Sriraman, Andrew D. Bailey, III, Richard Wise | 2020-01-14 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Juline Shoeb, Alex Paterson, Richard A. Gottscho | 2019-08-20 |
| 10303830 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2019-05-28 |
| 10254641 | Layout pattern proximity correction through fast edge placement error prediction | Julien Mailfert, Saravanapriyan Sriraman | 2019-04-09 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |
| 10032681 | Etch metric sensitivity for endpoint detection | Andrew D. Bailey, III, Duncan W. Mills | 2018-07-24 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2018-06-12 |
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2017-10-17 |
| 9640371 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III, Ramkumar Subramanian, Yoko Yamaguchi | 2017-05-02 |
| 9359250 | Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systems | Yuhui Jin, Ekaterina Aleksandrovna Kuksenkova, Santona Pal | 2016-06-07 |
| 9290410 | Method for sludge control in wet acid etching | Yuhui Jin, Jun Hou, Shyamala Shanmugam | 2016-03-22 |