Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283461 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2025-04-22 |
| 12119232 | Etching isolation features and dense features within a substrate | Alexander Paterson, Ying Wu | 2024-10-15 |
| 12068131 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2024-08-20 |
| 12057319 | Selective silicon dioxide removal using low pressure low bias deuterium plasma | Alexander Paterson | 2024-08-06 |
| 11915912 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2024-02-27 |
| 11569067 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2023-01-31 |
| 11462390 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2022-10-04 |
| 11398387 | Etching isolation features and dense features within a substrate | Alexander Paterson, Ying Wu | 2022-07-26 |
| 11049693 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2021-06-29 |
| 11011351 | Monoenergetic ion generation for controlled etch | Alexander Paterson, Ying Wu | 2021-05-18 |
| 10755896 | Multi-level pulsing of DC and RF signals | Alex Paterson, Ying Wu | 2020-08-25 |
| 10580618 | Multi-level pulsing of DC and RF signals | Alex Paterson, Ying Wu | 2020-03-03 |
| 10573494 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2020-02-25 |
| 10395894 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2019-08-27 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2019-08-20 |
| 10304660 | Multi-level pulsing of DC and RF signals | Alex Paterson, Ying Wu | 2019-05-28 |
| 10224183 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2019-03-05 |