Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297494 | Methods and systems for sample analysis | Pranav Patel, Amir Sadri, Yann Jouvenot | 2025-05-13 |
| 12077813 | Methods and systems for sample analysis | Pranav Patel, Amir Sadri, Yann Jouvenot | 2024-09-03 |
| 11885750 | Integrated wafer bow measurements | Rajan Arora, Michael Souza, Wayne Tang, Ye Feng | 2024-01-30 |
| 11056322 | Method and apparatus for determining process rate | Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2021-07-06 |
| 10930478 | Apparatus with optical cavity for determining process rate | Jagadeeshwari MANNE, Luc Albarede | 2021-02-23 |
| 10903050 | Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity | Luc Albarede | 2021-01-26 |
| 10784174 | Method and apparatus for determining etch process parameters | Luc Albarede | 2020-09-22 |
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Jorge Luque, Andrew D. Bailey, III | 2019-12-10 |
| 10302553 | Gas exhaust by-product measurement system | Cristian Siladie, Luc Albarede, Edward J. McInerney, Sassan Roham | 2019-05-28 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Jorge Luque, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |
| 10134569 | Method and apparatus for real-time monitoring of plasma chamber wall condition | Luc Albarede, Jorge Luque | 2018-11-20 |
| 9735069 | Method and apparatus for determining process rate | Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2017-08-15 |
| 9640371 | System and method for detecting a process point in multi-mode pulse processes | Jorge Luque, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2017-05-02 |
| 9548189 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Jorge Luque, Andrew D. Bailey, III | 2017-01-17 |