Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342163 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Dean J. Larson, Brian Severson | 2022-05-24 |
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Jason Lee Treadwell, Ivelin Angelov, Linda Marquez | 2020-11-03 |
| 10651015 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Dean J. Larson, Brian Severson | 2020-05-12 |
| 10302553 | Gas exhaust by-product measurement system | Luc Albarede, Yassine Kabouzi, Edward J. McInerney, Sassan Roham | 2019-05-28 |