Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469079 | Ultrahigh selective nitride etch to form FinFET devices | Kwame Eason, Dengliang Yang, Pilyeon Park, Faisal Yaqoob, Joon Hong Park +3 more | 2022-10-11 |
| 11342163 | Variable depth edge ring for etch uniformity control | Cristian Siladie, Dean J. Larson, Brian Severson | 2022-05-24 |
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Jason Lee Treadwell, Linda Marquez, Cristian Siladie | 2020-11-03 |
| 10727089 | Systems and methods for selectively etching film | James Eugene Caron, Joon Hong Park, Dengliang Yang | 2020-07-28 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | James Eugene Caron, Jason Lee Treadwell, Joon Hong Park, Canfeng Lai | 2020-06-30 |
| 10651015 | Variable depth edge ring for etch uniformity control | Cristian Siladie, Dean J. Larson, Brian Severson | 2020-05-12 |
| 10438833 | Wafer lift ring system for wafer transfer | Brian Severson, James Eugene Caron | 2019-10-08 |
| 10147588 | System and method for increasing electron density levels in a plasma of a substrate processing system | Kwame Eason, James Eugene Caron, Joon Hong Park, Dengliang Yang | 2018-12-04 |
| 9911620 | Method for achieving ultra-high selectivity while etching silicon nitride | Helen Zhu, Linda Marquez, Faisal Yaqoob, Pilyeon Park, Ivan L. Berry, III +1 more | 2018-03-06 |
| 9812349 | Control of the incidence angle of an ion beam on a substrate | Ivan L. Berry, III | 2017-11-07 |
| 9679749 | Gas distribution device with actively cooled grid | Serge Kosche | 2017-06-13 |
| 8851463 | Pedestal covers | Brian Severson, Natan Solomon | 2014-10-07 |
| 8371567 | Pedestal covers | Brian Severson, Natan Solomon | 2013-02-12 |
| D671901 | Pedestal cover | Brian Severson, Natan Solomon | 2012-12-04 |
| D641829 | Plasma reactor showerhead face plate having concentric ridge pattern | James Eugene Caron, Ilia Kalinovshi | 2011-07-19 |
| 7731798 | Heated chuck for laser thermal processing | Iqbal Shareef, Igor Landau, David A. Markle, Somit Talwar, Michael O. Thompson +1 more | 2010-06-08 |
| 7326877 | Laser thermal processing chuck with a thermal compensating heater module | Iqbal Shareef, Igor Landau, David A. Markle, Somit Talwar, Michael O. Thompson +1 more | 2008-02-05 |