Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469079 | Ultrahigh selective nitride etch to form FinFET devices | Dengliang Yang, Pilyeon Park, Faisal Yaqoob, Joon Hong Park, Mark Kawaguchi +3 more | 2022-10-11 |
| 11011388 | Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching | Pilyeon Park, Mark Kawaguchi, Seung Ho Park, Hsiao-Wei Chang | 2021-05-18 |
| 10283615 | Ultrahigh selective polysilicon etch with high throughput | Dengliang Yang, Faisal Yaqoob, Joon Hong Park | 2019-05-07 |
| 10276398 | High aspect ratio selective lateral etch using cyclic passivation and etching | Pilyeon Park, Mark Kawaguchi, Seung Ho Park, Hsiao-Wei Chang | 2019-04-30 |
| 10147588 | System and method for increasing electron density levels in a plasma of a substrate processing system | James Eugene Caron, Ivelin Angelov, Joon Hong Park, Dengliang Yang | 2018-12-04 |