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Systems and methods for controlling a plasma sheath characteristic |
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Systems and methods for selectively etching film |
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2020-07-28 |
| 10699878 |
Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring |
Ivelin Angelov, Jason Lee Treadwell, Joon Hong Park, Canfeng Lai |
2020-06-30 |
| 10438833 |
Wafer lift ring system for wafer transfer |
Brian Severson, Ivelin Angelov |
2019-10-08 |
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System and method for increasing electron density levels in a plasma of a substrate processing system |
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| 8916022 |
Plasma generator systems and methods of forming plasma |
— |
2014-12-23 |
| D641829 |
Plasma reactor showerhead face plate having concentric ridge pattern |
Ivelin Angelov, Ilia Kalinovshi |
2011-07-19 |
