Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | Alexei Marakhtanov, John Holland, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-07-15 |
| 10727089 | Systems and methods for selectively etching film | Ivelin Angelov, Joon Hong Park, Dengliang Yang | 2020-07-28 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | Ivelin Angelov, Jason Lee Treadwell, Joon Hong Park, Canfeng Lai | 2020-06-30 |
| 10438833 | Wafer lift ring system for wafer transfer | Brian Severson, Ivelin Angelov | 2019-10-08 |
| 10147588 | System and method for increasing electron density levels in a plasma of a substrate processing system | Kwame Eason, Ivelin Angelov, Joon Hong Park, Dengliang Yang | 2018-12-04 |
| 8916022 | Plasma generator systems and methods of forming plasma | — | 2014-12-23 |
| D641829 | Plasma reactor showerhead face plate having concentric ridge pattern | Ivelin Angelov, Ilia Kalinovshi | 2011-07-19 |