Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469079 | Ultrahigh selective nitride etch to form FinFET devices | Kwame Eason, Dengliang Yang, Pilyeon Park, Faisal Yaqoob, Joon Hong Park +3 more | 2022-10-11 |
| 11011388 | Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching | Kwame Eason, Pilyeon Park, Mark Kawaguchi, Seung Ho Park | 2021-05-18 |
| 10276398 | High aspect ratio selective lateral etch using cyclic passivation and etching | Kwame Eason, Pilyeon Park, Mark Kawaguchi, Seung Ho Park | 2019-04-30 |