Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347650 | Substrate processing system including dual ion filter for downstream plasma | Andrew Stratton Bravo, Chih-Hsun Hsu, Stephen Whitten, Shih-Chung Kon, Mark Kawaguchi +3 more | 2025-07-01 |
| 11967486 | Substrate processing system including dual ion filter for downstream plasma | Andrew Stratton Bravo, Chih-Hsun Hsu, Stephen Whitten, Shih-Chung Kon, Mark Kawaguchi +3 more | 2024-04-23 |
| 9679749 | Gas distribution device with actively cooled grid | Ivelin Angelov | 2017-06-13 |