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Substrate processing system including dual ion filter for downstream plasma |
Andrew Stratton Bravo, Chih-Hsun Hsu, Serge Kosche, Shih-Chung Kon, Mark Kawaguchi +3 more |
2025-07-01 |
| 11967486 |
Substrate processing system including dual ion filter for downstream plasma |
Andrew Stratton Bravo, Chih-Hsun Hsu, Serge Kosche, Shih-Chung Kon, Mark Kawaguchi +3 more |
2024-04-23 |
| 8276604 |
Peripherally engaging electrode carriers and assemblies incorporating the same |
Jason Augustino, Armen Avoyan, Yan Fang, Duane Outka, Hong Shih |
2012-10-02 |
| 8221552 |
Cleaning of bonded silicon electrodes |
Duane Outka, Jason Augustino, Armen Avoyan, Hong Shih, Yan Fang |
2012-07-17 |
| 8171877 |
Backside mounted electrode carriers and assemblies incorporating the same |
Jason Augustino, Armen Avoyan, Yan Fang, Duane Outka, Hong Shih |
2012-05-08 |
| 8075701 |
Processes for reconditioning multi-component electrodes |
Armen Avoyan, Yan Fang, Duane Outka, Hong Shih |
2011-12-13 |
| RE42495 |
Intruder detection and warning system |
Richard Stockstill |
2011-06-28 |
| 7327253 |
Intruder detection and warning system |
Richard Stockstill |
2008-02-05 |
