Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347661 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Maolin Long, Junliang Li | 2025-07-01 |
| 12009184 | Lift pin assembly for a plasma processing apparatus | Maolin Long | 2024-06-11 |
| 10854482 | Reaction chamber and plasma processing apparatus | Xingcun Li, Gang Wei, Dongsan Li, Mingda Qiu, Longchao Zhao +1 more | 2020-12-01 |