Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106970 | Pattern sheet, semiconductor intermediate product, and hole etching method | Qiushi Xie, Xiaoping Shi, Qingjun Zhou, Chun Wang, Yiming Zhang | 2024-10-01 |
| 10854482 | Reaction chamber and plasma processing apparatus | Xingcun Li, Gang Wei, Changle Guan, Mingda Qiu, Longchao Zhao +1 more | 2020-12-01 |
| 9187319 | Substrate etching method and substrate processing device | Gang Wei, Chun-Min Wang | 2015-11-17 |