Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347645 | Substrate processing method and substrate processing apparatus | Shinya Morikita, Akira Hidaka | 2025-07-01 |
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Yasutaka HAMA, Motoki Noro | 2024-01-23 |
| 11201063 | Substrate processing method and substrate processing apparatus | Yasutaka HAMA, Motoki Noro | 2021-12-14 |