Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887824 | Method of cleaning plasma processing apparatus and plasma processing apparatus | Nobuaki Shindo | 2024-01-30 |
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Motoki Noro, Shu Kino | 2024-01-23 |
| 11705309 | Substrate processing method | Ryo Matsubara, Nobuaki Shindo | 2023-07-18 |
| 11201063 | Substrate processing method and substrate processing apparatus | Motoki Noro, Shu Kino | 2021-12-14 |
| 10998223 | Method for processing target object | Seiji Yokoyama | 2021-05-04 |
| 10950458 | Etching method | Shinya Morikita, Kiyohito Ito | 2021-03-16 |
| 10297496 | Method for processing target objection | Seiji Yokoyama | 2019-05-21 |