Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Yasutaka HAMA, Shu Kino | 2024-01-23 |
| 11201063 | Substrate processing method and substrate processing apparatus | Yasutaka HAMA, Shu Kino | 2021-12-14 |
| 9165764 | Plasma treatment method and plasma treatment device | Masaki Inoue, Kazuhisa Ishii, Shinji Kawada | 2015-10-20 |
| 8946030 | Method for forming dummy gate | Tai-Chuan Lin, Shinji Kawada | 2015-02-03 |