Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092962 | Measurements of structures in presence of signal contaminations | Jingsheng Shi, Yiliang Liu, Jie Li | 2024-09-17 |
| 11346768 | Vortex polarimeter | Kenneth E. James, John Lesoine | 2022-05-31 |
| 10621264 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Ye Feng, Daniel Thompson, Yan Zhang | 2020-04-14 |
| 10296554 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Ye Feng, Daniel Thompson, Yan Zhang | 2019-05-21 |
| 10274367 | Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device | Amit Shachaf, Michael Elad | 2019-04-30 |
| 9995689 | Optical metrology using differential fitting | — | 2018-06-12 |
| 9958327 | Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device | Amit Shachaf, Michael Elad | 2018-05-01 |
| 8427645 | Mueller matrix spectroscopy using chiroptic | Pablo I. Rovira | 2013-04-23 |
| 7751061 | Non-contact apparatus and method for measuring a property of a dielectric layer on a wafer | — | 2010-07-06 |
| 7410815 | Apparatus and method for non-contact assessment of a constituent in semiconductor substrates | — | 2008-08-12 |