Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326407 | Inspection apparatus and inspection method | Nitish Kumar, Markus Gerardus Martinus Maria Van Kraaij, Konstantin Tsigutkin, Willem Marie Julia Marcel Coene | 2025-06-10 |
| 11692948 | Inspection apparatus and inspection method | Nitish Kumar, Markus Gerardus Martinus Maria Van Kraaij, Konstantin Tsigutkin, Willem Marie Julia Marcel Coene | 2023-07-04 |
| 11442368 | Inspection tool, inspection method and computer program product | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Albertus Victor Gerardus MANGNUS | 2022-09-13 |
| 11347151 | Methods and apparatus for calculating electromagnetic scattering properties of a structure | Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO | 2022-05-31 |
| 10976265 | Optical detector | Sander Bas Roobol | 2021-04-13 |
| 10634490 | Determining edge roughness parameters | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef, Michael Kubis | 2020-04-28 |
| 10555407 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2020-02-04 |
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2019-07-02 |
| 10254644 | Metrology methods, metrology apparatus and device manufacturing method | Nitish Kumar | 2019-04-09 |
| 10222709 | Metrology method, metrology apparatus and device manufacturing method | — | 2019-03-05 |
| 10146140 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Maxim PISARENCO, Markus Gerardus Martinus Maria Van Kraaij | 2018-12-04 |
| 10101671 | Metrology methods, metrology apparatus and device manufacturing method | Arie Jeffrey Den Boef | 2018-10-16 |
| 10067074 | Metrology methods, metrology apparatus and device manufacturing method | Serhiy Danylyuk | 2018-09-04 |
| 10036962 | Inspection apparatus and methods, lithographic system and device manufacturing method | — | 2018-07-31 |
| 9915879 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Willem Marie Julia Marcel Coene | 2018-03-13 |
| 9904181 | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method | — | 2018-02-27 |
| 9823586 | Inspection apparatus, inspection method and manufacturing method | — | 2017-11-21 |
| 9632424 | Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method | — | 2017-04-25 |
| 9563131 | Lithographic apparatus, substrate and device manufacturing method | — | 2017-02-07 |
| 9261772 | Lithographic apparatus, substrate and device manufacturing method | — | 2016-02-16 |
| 8876346 | Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method | — | 2014-11-04 |