Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067074 | Metrology methods, metrology apparatus and device manufacturing method | Richard Quintanilha | 2018-09-04 |
| 8410792 | Resonator arrangement and method for analyzing a sample using the resonator arrangement | Norbert Klein, Svetlana Vitusevich | 2013-04-02 |