Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12269229 | Reflector manufacturing method and associated reflector | Sietse Thijmen Van Der Post | 2025-04-08 |
| 11626704 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Sietse Thijmen Van Der Post, Pavel Evtushenko | 2023-04-11 |
| 11353796 | Method and apparatus for determining a radiation beam intensity profile | Teis Johan Coenen, Han-Kwang Nienhuys, Sandy Claudia SCHOLZ | 2022-06-07 |
| 11092902 | Method and apparatus for detecting substrate surface variations | Johannes F. M. D'Achard Van Enschut, Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Yang-Shan Huang +3 more | 2021-08-17 |
| 10983361 | Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus | Simon Gijsbert Josephus Mathijssen, Stefan Michael Bruno Bäumer | 2021-04-20 |
| 10976265 | Optical detector | Richard Quintanilha | 2021-04-13 |
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2020-10-27 |
| 10725387 | Determining an edge roughness parameter of a periodic structure | Teis Johan Coenen, Sipke Jacob Bijlsma | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Peter Danny Van Voorst | 2020-06-02 |
| 10649344 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Simon Gijsbert Josephus Mathijssen | 2020-05-12 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-04-21 |
| 10578979 | Method and apparatus for inspection and metrology | Sietse Thijmen Van Der Post, Ferry Zijp | 2020-03-03 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-01-07 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-10-22 |
| 10379448 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Simon Gijsbert Josephus Mathijssen, Nan Lin, Willem Marie Julia Marcel Coene, Arie Jeffrey Den Boef | 2019-08-13 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-06-25 |
| 10267744 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Patricius Aloysius Jacobus Tinnemans, Nan Lin, Simon Gijsbert Josephus Mathijssen | 2019-04-23 |
| 10248029 | Method and apparatus for inspection and metrology | Sietse Thijmen Van Der Post, Ferry Zijp | 2019-04-02 |
| 10234771 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2019-03-19 |
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Simon Gijsbert Josephus Mathijssen, Nan Lin | 2018-11-20 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Nan Lin | 2018-09-04 |
| 10048596 | Method and apparatus for generating illuminating radiation | Nan Lin, Simon Gijsbert Josephus Mathijssen | 2018-08-14 |