Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Sylvianne Dorothea Christina ROSCAM ABBING, Filippo CAMPI, ZhuangYan ZHANG, Petrus Wilhelmus SMORENBURG +2 more | 2025-09-09 |
| 12044951 | Illumination source and associated metrology apparatus | Wenjie JIN, Christina Lynn PORTER, Petrus Wilhelmus SMORENBURG | 2024-07-23 |
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2020-10-27 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-04-21 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-01-07 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-10-22 |
| 10379448 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Simon Gijsbert Josephus Mathijssen, Sander Bas Roobol, Willem Marie Julia Marcel Coene, Arie Jeffrey Den Boef | 2019-08-13 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-06-25 |
| 10267744 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Patricius Aloysius Jacobus Tinnemans, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-04-23 |
| 10234771 | HHG source, inspection apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2019-03-19 |
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Simon Gijsbert Josephus Mathijssen, Sander Bas Roobol | 2018-11-20 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Sander Bas Roobol | 2018-09-04 |
| 10048596 | Method and apparatus for generating illuminating radiation | Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2018-08-14 |
| 7458256 | Tire pressure monitoring device | — | 2008-12-02 |