Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9874512 | Method and system for gas flow mitigation of molecular contamination of optics | Terry Johnson, Marco Arienti, Salam Harb, Lennie Klebanoff, Rudy F. Garcia +2 more | 2018-01-23 |
| 9842724 | Method and system for imaging of a photomask through a pellicle | William G. Schultz, Garry Rose | 2017-12-12 |
| 9818887 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2017-11-14 |
| 9810991 | System and method for cleaning EUV optical elements | Frank Chilese, Rudy F. Garcia | 2017-11-07 |
| 9759912 | Particle and chemical control using tunnel flow | Frank Chilese, Daniel Wack, John R. Torczynski, Leonard E. Klebanoff | 2017-09-12 |
| 9721761 | Open plasma lamp for forming a light-sustained plasma | Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine | 2017-08-01 |
| 9662688 | Apparatus and method for cross-flow purge for optical components in a chamber | Garry Rose, H. Steven Larson, Daniel R. Hennigan | 2017-05-30 |
| 9573111 | High purity ozone generator for optics cleaning and recovery | Garry Rose, H. Steven Larson | 2017-02-21 |
| 9526158 | Laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao | 2016-12-20 |
| 9516733 | Laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao | 2016-12-06 |
| 9496425 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2016-11-15 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Rudy F. Garcia, Leonard E. Klebanoff, Daniel J. Rader +2 more | 2016-07-12 |
| 9335279 | Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection | — | 2016-05-10 |
| 9335637 | Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation | Daniel Wack | 2016-05-10 |
| 9277634 | Apparatus and method for multiplexed multiple discharge plasma produced sources | — | 2016-03-01 |
| 9263238 | Open plasma lamp for forming a light-sustained plasma | Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine | 2016-02-16 |
| 9244368 | Particle control near reticle and optics using showerhead | Frank Chilese, Rudy F. Garcia, John R. Torczynski, Anthony S. Geller, Daniel J. Rader +2 more | 2016-01-26 |
| 9188544 | Protective fluorine-doped silicon oxide film for optical components | — | 2015-11-17 |
| 9156068 | Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation | Leonard E. Klebanoff, Jeromy T. Hollenshead, Karl R. Umstadter, Elena Starodub, Guorong V. Zhuang | 2015-10-13 |
| 9099292 | Laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao | 2015-08-04 |
| 8790603 | Apparatus for purifying a controlled-pressure environment | Guorong V. Zhuang | 2014-07-29 |
| 8414688 | Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping | Frank Chilese, Rudolf Brunner | 2013-04-09 |
| 8216773 | Broadband plasma light sources for substrate processing | — | 2012-07-10 |
| 7652430 | Broadband plasma light sources with cone-shaped electrode for substrate processing | — | 2010-01-26 |