HL

H. Steven Larson

KL Kla-Tencor: 2 patents #566 of 1,394Top 45%
Overall (All Time): #1,974,186 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9662688 Apparatus and method for cross-flow purge for optical components in a chamber Garry Rose, Gildardo Delgado, Daniel R. Hennigan 2017-05-30
9573111 High purity ozone generator for optics cleaning and recovery Garry Rose, Gildardo Delgado 2017-02-21