Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894214 | Detection and correction of system responses in real-time | Stefan Eyring, Christopher T. Sears | 2024-02-06 |
| 11508551 | Detection and correction of system responses in real-time | Stefan Eyring, Christopher T. Sears | 2022-11-22 |
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Stefan Eyring, Ulrich Pohlmann, Inna Steely-Tarshish, Nadav Gutman | 2021-12-28 |